JPH01177268U - - Google Patents
Info
- Publication number
- JPH01177268U JPH01177268U JP7370488U JP7370488U JPH01177268U JP H01177268 U JPH01177268 U JP H01177268U JP 7370488 U JP7370488 U JP 7370488U JP 7370488 U JP7370488 U JP 7370488U JP H01177268 U JPH01177268 U JP H01177268U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- ion source
- filaments
- switch
- arc chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7370488U JPH01177268U (en]) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7370488U JPH01177268U (en]) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177268U true JPH01177268U (en]) | 1989-12-18 |
Family
ID=31298836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7370488U Pending JPH01177268U (en]) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177268U (en]) |
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1988
- 1988-06-02 JP JP7370488U patent/JPH01177268U/ja active Pending